Used PVA TEPLA / TECHNICS Gigabatch 300 #9358976 for sale

PVA TEPLA / TECHNICS Gigabatch 300 is a high-performance etcher/asher designed for high-volume etch and ashing applications. The equipment utilizes proven core technologies to provide a high level of etching and ashing efficiency and product quality. TECHNICS Gigabatch 300 is based on a reliable and precise microprocessor-controlled vertical structure with a large open chamber for accommodating a wide variety of wafers and substrates. The etcher/asher features an intuitive touchscreen human-machine interface (HMI) for setting of process parameters. The user can control the etcher/asher quickly and conveniently without prior knowledge or expertise. PVA TEPLA Gigabatch 300 offers a wealth of features to enhance the effectiveness of the etching and ashing process. It includes an advanced robotic stacker system for loading and unloading of wafers and substrates quickly and safely.The etcher/asher is equipped with a process temperature range from 300°F up to 900°F, adjustable in increments of 5°F for greater control over precision in processes. An in-situ quartz crystal spectrometer for real-time monitoring of the process is also included. Gigabatch 300 features a high-efficiency gas delivery unit, allowing the user to select an ideal gas mixture for their process. Selected gases are stored in a common gas box, allowing precise gas delivery to the load chamber. Additionally, the machine is designed for low maintenance and easy maintenance processes. PVA TEPLA / TECHNICS Gigabatch 300 also features a leak-proof, highly efficient loadlock tool to ensure a clean reaction in the process chamber. The asset also has a vapor recirculation model for maintaining the temperature profiles inside the reaction chamber. This will ensure rapid cooling of the wafers, thus reducing process costs. TECHNICS Gigabatch 300 is designed to offer excellent repeatability of etching or ashing processes and is perfect for customers looking for high-volume etching and ashing at a cost-effective price. With its array of features, PVA TEPLA Gigabatch 300 is an excellent choice for etching and ashing in a wide range of industrial and academic environments.