Used PVA TEPLA / TECHNICS PlanarEtch II 750 #145818 for sale

PVA TEPLA / TECHNICS PlanarEtch II 750 is an etcher/asher designed specifically to meet the needs of advanced lithography and micromachining applications. This etcher/asher is capable of high-precision processing and is reliable, cost-effective and easy to operate. The equipment is equipped with a direct-view high resolution colour LCD screen and an intuitive computer interface that provides easy program up load as well as simple navigation through the system menus. TECHNICS PlanarEtch II 750 is fitted with a DC plasma source generating an extremely stable and repeatable process with the optimum combination of selectivity and uniformity. The unit is equipped with an innovative gas control machine for precision gas flow monitoring and control to meet the most demanding processing requirements. The process parameters such as gas flow rates, etch rates, bias setting and other processes are adjustable for different applications. The tool is capable of processing substrates up to 8.5" x 8.5" in size. The substrate is positioned on a 30-degree angled aluminum platen and is held in place with a non-intrusive clamping mechanism which ensures the highest precision and uniformity. The asset also has a chamber pressure control model which maintains optimum etch conditions when the equipment is used under vacuum or pressure. PVA TEPLA PlanarEtch II 750 is a highly reliable system and is designed for maximum uptime. The unit includes a subsystem monitoring machine with automatic task timeout protection and over-temperature shutdown prevention, as well as power interlock and door interlock. The tool is also equipped with a robust auto-diagnosis program that monitors the overall status of the processes and asset's health. PlanarEtch II 750 is a one-stop etching solution. It is compatible with inductively coupled plasmas, reactive ion etches, contact etches and n-well etch processes. This versatile model can replace several traditional solution processing techniques, thereby providing high quality, repeatable and reliable processes for advanced lithography and micromachining.