Used QUATERNARY JSPCS-750 #9395897 for sale

QUATERNARY JSPCS-750
ID: 9395897
Plasma cleaner.
QUATERNARY JSPCS-750 is an etcher/asher used in the semiconductor industry. It has adjustable optical parameters for maximum utility in a wide variety of applications. JSPCS-750 is a fully automatic equipment that includes multiple temperature sensors for precise temperature control. The etcher/asher features an intelligent E-beam pattern generator, an advanced optical imaging system, and the Vacu-Vario vacuum unit which supports cleaning applications for very small thermally sensitive materials. QUATERNARY JSPCS-750 is designed with a large-capacity tank and multiple-jet design that ensures perfectly distributed etching or ashing of all semiconductor substrate materials. The bevel-free process chamber has rounded corners for better gas distribution and optimal etching or ashing uniformity. The etcher/asher also has Pulsatron adjustment and timing technology that is designed to reduce chemical concentration instability when etching. The machine is designed with a variable-pressure control chamber and temperature control, which is matched to the etching or ashing applications. In addition, JSPCS-750 offers advanced compensation for non-ideal incoming gas values, allowing users to easily customize process parameters such as temperature, pressure, and flow rates. The etcher/aser's sophisticated vacuum tool safely removes etching or ashing residue and particle contaminants from the process chamber for quick and easy media cleaning. The asset also includes variable-position/angle ablation sources for repeatable process uniformity. QUATERNARY JSPCS-750 offers a high-volume volume/throughput capacity for cost-effective fast-turnaround production runs. It is designed with a dynamic HeNe-LiDAR laser beam stabilization model for precise control and improved processing accuracy. The equipment also integrates oxygen-enhanced etching chemistry to improve processing of semiconductor materials that require high spatial resolution control. The etcher/asher also features three-stage power switching and voltage monitoring for efficient power management and trouble-free long-term operation.
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