Used RAMCO Ram 250 #9181898 for sale

RAMCO Ram 250
Manufacturer
RAMCO
Model
Ram 250
ID: 9181898
Wafer Size: 6"
Batch plasma system, 6".
RAMCO Ram 250 is an etcher and asher, designed for industrial and research applications in manufacturing and laboratory environments. It is capable of a wide range of etching, ashing, and ablation processes, giving users control over the etching and ashing process. Ram 250 features a 12" x 14" capacitively coupled chamber, that is designed to minimize contamination from external sources and offer a uniform etching profile. The chamber is constructed with a stainless steel lid and alloy insulated walls, and includes a single photomask holder. It can process up to 10" wafers with a range of etching chemistries, such as Ar, O2, and CHF3. The system operates at a pressure range of 0.2-2.0 Torr, allowing for both high-rate and high-selectivity etches in both wet and dry etching chemistries. In addition to its etching capabilities, RAMCO Ram 250 also offers ashing capabilities, enabling users to selectively remove photoresist-coated layers from a substrate. It can process substrates up to 10" in diameter and up to 4" thick. In addition to ashing, the system also offers sputter cleaning, deposit etching, and etch-and-rinse processes. Ram 250 has several features that make it suitable for research and development applications, including its dual-frequency RF power supplies, adjustable gas flows, digital readouts, and onboard safety and calibration controls. It also offers a 6-port rotary valve for multiple process chambers, ensuring that multiple substrates can be processed simultaneously. In terms of safety, RAMCO Ram 250 has been designed to comply with Occupational Safety and Health Administration (OSHA) requirements and is equipped with a no-vent system to eliminate potential hazardous gas discharges into the lab. In addition, it is EEC, UL, and CSA approved. Overall, Ram 250 is a versatile etcher and asher, offering both etching and ashing capabilities in a compact, easy-to-use unit. It is engineered for reliable performance and has several features for safety and efficiency. RAMCO Ram 250 is an ideal choice for laboratories and manufacturers seeking a reliable and versatile etcher and asher for varied etch and ashing applications.
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