Used RAMCO Ram 5 #62126 for sale
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RAMCO Ram 5 is a state-of-the-art etching and ashing machine used in the semiconductor industry. It is a robust, fast, and precise tool used for etching and ashing delicate components such as ICs, MEMS, and other microelectronic components. Ram 5 offers the highest etching and ashing performance in its class with maximum utilization of uptime, accuracy and repeatability. RAMCO Ram 5 features an automatic loading and unloading mechanism for processing parts up to 10" x 14". The main chamber has an increased usable volume for loading and unloading of up to 8"x12" parts. The equipment is designed to operate at temperatures up to 400ºC with a process pressure of up to 10 Torr. There are nitrogen gas options available for applications requiring inert atmosphere. Additionally, the RF etching and ashing process allows the ability to optimize etch and ash profile independently in order to increase yield. Ram 5 is equipped with a powerful process controller with a touch screen display which provides manual and automated operation. It can store up to 10 recipes in up to 250 steps and has a user-friendly interface. The controller also supports PC connection integrated circuit testers, and automated metrology, which can accurately process repeatable etch and ashing results. The process gas delivery system ensures precise operations and results in repeatable etch and ash results. It also has an integrated advanced digital process control unit for keeping temperature, pressure, and flow rate constant. Additionally, the machine features a dual-pocket integrated particle filtration tool which removes any particulate contamination from the process gases. RAMCO Ram 5 is a professional-grade etcher and asher that meets and exceeds industry standards for safety, reliability, and performance. It is trusted by various industries and can be used for a variety of applications such as etching and ashing of thin film and interconnect layers, patterning, and imaging. With the advanced process control, high precision, and repeatability, Ram 5 is the ideal tool for high-yield, cost-effective processes in the semiconductor manufacturing industry.
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