Used RAMCO RAM8500-II #293625752 for sale
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RAMCO RAM8500-II Asher/Etcher is a high performance plasma processing equipment that offers superior performance, unprecedented flexibility, and superior controllability. This unit provides etching and ashing capabilities in combination with a new integrated control system, which together provide precise control over substrate processing. It is capable of performing precise etching and ashing functions on an array of thin films and thick films. RAM8500-II utilizes an enhanced plasma source and processing mode that produces high uniformity etching, cleaning and ashing operations. The integrated control unit and processing parameters enhance the overall consistency and accuracy of processing; a state-of-the-art graphic user interface allows operators to quickly and easily enter processing parameters. In addition, the unit can be programmed to execute complex etching, ashing, and cleaning sequences automatically. RAMCO RAM8500-II can run a variety of gases in either etching or ashing mode. For etching and ashing processes, RAM8500-II can process thin films in a variety of corrosive and oxidizing etching and ashing reactions (e.g. F2, O2, N2, and Ar). The unit is also capable of performing etching, cleaning and ashing operations with inert inert gases (e.g. Ar, He and N2). RAMCO RAM8500-II features a large range of processing capabilities, allowing the user to tailor their process based on the substrate and the requirements of the application. The integrated control machine and process parameters allow the user to precisely control the plasma processing parameters, allowing for greater process control and repeatability. The unit can be used for a wide range of thin film etching and ashing operations, such as isolation etching, Shallow Trench Isolation (STI) etching, resist stripping and ashing, as well as Multi-Layer Metal (MLM) etching and ashing. RAM8500-II Asher/Etcher provides the greatest in-measurement accuracy and control among an array of thin film etching and ashing systems. With its improved plasma source and integrated software, it provides users with precise control over the etching/ashing process, allowing for repeatable results with high accuracy and repeatability. As a result, RAMCO RAM8500-II is well suited for a wide range of thin film etching and ashing applications.
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