Used SAMCO PC-1100 #293802272 for sale
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SAMCO PC-1100 is an etching and ashing machine designed for advanced micro-fabrication processes in the semiconductor industry. Its advanced etching and ashing capabilities, high throughput rates, high level of accuracy and repeatability, and sophisticated control equipment make it a desired choice for a broad range of device fabrication processes. At the heart of this machine is the patented etch head which can support a wide range of etch and ashing technologies, including chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), electron cyclotron resonance (ECR), magnetron sputtering, and wet etching. The etch head is equipped with an appropriate heater to assist with uniform etching and/or ashing. The setup and usage of the etch head in PC-1100 is facilitated further by the provided 5-axis stage, microscope with autofocus navigation system, and onboard torque generators. With the capability to etch structures and features with dimensions as small as 50 nm, SAMCO PC-1100 facilitates precise target fabrication in a minimum amount of time. The unit's patented Easy Setup Wizard ensures ease and accuracy in programming the etch parameters for a target, allowing designers to quickly fabricate device structures with ease. The machine can also be programmed to etch with a high degree of repeatability, eliminating the need for multiple cycles of etching to achieve desired device characteristics. PC-1100 also features a multi-zone temperature controller for controlling both substrate and chamber temperature during the etching process. In addition, the multi-zone controller also provides fine-tuning capability for controlling the etch slope, which is critical for high-end etching applications. SAMCO PC-1100 also supports a comprehensive set of safety features, including high-pressure water detection tool, inert gas control asset, chamber pressure monitoring model, and a vacuum monitoring equipment, to ensure operator safety and equipment protection. In conclusion, PC-1100 is an advanced etching and ashing machine built with advanced technology, offering greater throughput rate, high fabrication accuracy, and repeatability. It provides a reliable and easy way to fabricate intricate and complex device structures, making it ideal for use in sophisticated semiconductor device applications.
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