Used SAMCO PD-200D #9048862 for sale

SAMCO PD-200D
Manufacturer
SAMCO
Model
PD-200D
ID: 9048862
Sputtering system Application: DLC Film molding.
SAMCO PD-200D is a specialized etcher/asher designed for high quality etching and ashing applications in semiconductor and electronics manufacturing. This model is a dual-chamber, benchtop equipment that works with both wet and dry etching and ashing processes with integrated delivery and process control systems. PD-200D system features a closed etching chamber for high-precision etching and ashing with precise temperature control and process monitoring. It delivers high quality etched or ashed surfaces at a high throughput rate with superior repeatability, and can be used with a variety of gases and chemicals including oxygen, argon, sulfur hexafluoride, ammonium hydroxide, and hydrochloric acid. The unit also features advanced process flow control technology for optimal ashing performance with process recipes that can be tailored to users' specific needs. With easy-to-use software and data acquisition features, users can store or transfer recipes as well as configure process parameters. SAMCO PD-200D also includes gas and instrument validation as well as process monitoring and recording to ensure optimal process performance and accuracy. In the etching chamber, metal and ceramic substrates can be processed in vacuum, allowing for high precision etching and ashing of small or difficult to reach areas. The etching chamber features a load lock to minimize gas and chemical loss and flow control with profiles programmable to user's needs. The pressure is controlled with a vacuum gauge and the machine is equipped with a mass flow controller to precisely measure and control the gas distribution. The ashing chamber is equipped with a PC-controlled programmable thermal organic vapor source, allowing for precise and repeatable ashing on delicate substrates. The chamber is temperature controlled, with an adjustable range between 0°C and 200°C. Overall, PD-200D is designed to meet the highest standards for quality etching and ashing with precise process control, high throughput rate, and superior repeatability.
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