Used SAMCO RIE-10N #9354075 for sale

SAMCO RIE-10N is an etcher/asher manufactured by SAMCO, a leading Japanese equipment provider in the field of semiconductor devices. This machine provides a robust and reliable etch/ash process to create intricate patterns in a wide range of substrates. RIE-10N is equipped with both a reaction chamber and a processing chamber for simultaneous etching and ashing of wafer and substrate surfaces. The reaction chamber is heated separately from the processing chamber, allowing the user to precisely control the temperature for either an etch or an ash process. The tight temperature control of the reaction chamber is important for creating strategically designed surface features in wafers and other surfaces. SAMCO RIE-10N is capable of scalping and ashing substrates up to 20" x 20" in size. An inductively coupled plasma (ICP) source is integrated into the machine, enabling etching and ashing to be conducted simultaneously. This feature is beneficial, as it reduces processing time considerably and allows the user to achieve very tight dimensional tolerances. RIE-10N is also equipped with a large vacuum equipment with a base pressure of 1.3x10-5 Torr. This allows for very high quality plasma etching results, making the machine suitable for many different etching and ashing applications. SAMCO RIE-10N has a user-friendly graphical user interface (GUI) which facilitates efficient operation and allows for precise control of parameters such as gas flow rate, temperature, pressure, and RF power. The machine can be equipped with a vacuum chuck or non-vacuum system for ultra fine processing of any substrate. An optional end-point detection unit allows users to control the etch and ash process and quickly identify the end point of the process. RIE-10N also comes with advanced safety features such as a built-in interlock machine that prevents personnel from entering the processing chamber when in operation and an alarm tool to alert users in the event of an emergency. All of these features combined make SAMCO RIE-10N an excellent choice for semiconductor device fabrication.