Used SAMCO RIE-10NR #9083619 for sale

SAMCO RIE-10NR is a single frequency, radio frequency plasma etcher / asher. It uses the Radio Frequency Induction Excitation (RIFE) process which uses a single frequency, high frequency radio signal to generate an inductively coupled plasma. SAMCO RIE 10 NR has a frequency range of 13.56MHz for optimum etching performance and can be used to etch a variety of substrates including silicon, glass, metals, and polymers. RIE-10NR features a compact design with the RF generator, gas distribution unit, and RF power feeding unit all incorporated into a single unit. This allows for high precision etching and accurate control of the RF generator. The etcher/asher also features an easily adjustable chamber size, enabling wafer sizes from 5-10 cm to be processed. RIE 10 NR uses a series of coils for the generation of the RF power field. These coils are enclosed in an all-metal stainless-steel chamber to ensure high precision etching and protection against cross-contamination and wear. SAMCO RIE-10NR uses a direct gas delivery system to ensure uniform gas flow throughout the chamber. This allows for precise control of the process gases to achieve an optimal etching rate. The process pressure can be controlled by adjusting the pressure regulator, allowing for uniformity of etch depth and profile. SAMCO RIE 10 NR also allows for precise control of gas mixtures, enabling higher etch rates and better etch profile definition. RIE-10NR provides very high accuracy etch rates, with precise control of the etch parameters. It also features a single pass etch process with multiple recipe settings, enabling multiple etch processes in one single run. The etcher features a short cycle of up to 5 minutes, enabling higher throughput with increased quality control. It also features built in temperature and temperature uniformity control, as well as a robotic interface for precision control of the etching process. RIE 10 NR is an ideal etcher/asher for high precision etching applications, providing high accuracy and repeatability in the etching process. Additionally, its integrated modular design ensures low maintenance and easy operation. This etcher/asher provides an ideal solution for micro-machining, surface modification, and other etching applications in a wide variety of industries.