Used SAMCO RIE-200IPC #293656750 for sale

SAMCO RIE-200IPC is a highly efficient etcher / asher designed for the specific task of etching and ashing of semiconductor wafers. It is built using a number of advanced technologies and features that allow it to achieve high productivity and precise process control. RIE-200IPC comes powered by an advanced SAM-RIE (Sam Engineering RIE) automated precision etching and ashing equipment. This system consists of a patented dual magnetic agitation unit combined with a two stage deep vacuum process and variable frequency microwave technology, which provides reliable and repeatable process results. It also features a low process pressure (down to 1.5 Pa) capability, a wide chamber temperature range of -5°C to +200°C and a rapid wafer transfer time (under 2 minutes). SAMCO RIE-200IPC is also equipped with a variety of safety features for added safety and reliability, including an auto-shutoff machine and fault monitoring. This tool also offers excellent process repeatability and controllability. The asset is equipped with a three-axis motion controller, allowing for manipulation of wafer angles for precise etching / ashing. Additionally, the built-in front panel display and interactive user interface provide clear feedback on the current processing conditions at the touch of a button. RIE-200IPC is designed to provide excellent throughput rates due to its low cycle times. It has a cycle rate of 1 wafer batch/15 minutes, and a maximum throughput of 30 wafers/hour. Furthermore, it minimizes material consumption due to its capability for edge-loss control and efficient waste vapour recovery model. This etching / ashing equipment also offers reliable environmental protection due to its low outgassing and temperature stability. SAMCO RIE-200IPC etch / ash system is a well-rounded unit that will meet the process needs of a variety of semiconductor applications. Its highly efficient automated etching and ashing machine, extensive safety features, and capable process control are all factors that contribute to its superior performance and reliability.