Used SAMCO RIE-200IPC #9183499 for sale

SAMCO RIE-200IPC
Manufacturer
SAMCO
Model
RIE-200IPC
ID: 9183499
ICP Dry etcher Currently installed.
SAMCO RIE-200IPC is a reactive ion etcher (RIE) designed for etching a wide range of materials, from hard to soft. It is a cost-effective production equipment that is capable of handling both low and high-volume runs. The etcher is equipped with a movable lower platen, which allows for precision alignment of the etched wafer. This etcher features a standard quartz chamber, making it highly durable and long-lasting. RIE-200IPC has adjustable pressure and temperature control systems that enable etching at various depths and temperatures. These settings can be adjusted on the automated touch screen interface. The etcher also features on-board materials list and recipe storage for repeatable process results. The system is highly programmable, allowing for both manual and automatic operation modes. The two process gases, modified O2 and NF3, can be independently regulated for specialized processes, including high and low pressure processing. SAMCO RIE-200IPC can etch a wide variety of materials and substrates including hard polymers, silicon, silicon dioxide, and gallium arsenide. The etcher utilizes a reverse magnetron that can provide a uniform etch rate over wafer areas up to 6 inches in diameter. The etcher comes with an onboard shutter unit that can be used to prevent material buildup and reduce post-etching process time. The machine also features an integrated particle control tool that helps minimize product contamination. This asset is designed around high-efficiency filtration, which includes a high-efficiency particulate air filter and a HEPA filter to reduce airborne contamination. Additionally, RIE-200IPC also features a maintenance-free remote after-treatment model, designed to reduce chamber contamination. The equipment is also equipped with a leak check system and a vacuum unit to monitor the etching efficiency. Overall, SAMCO RIE-200IPC is highly advanced and reliable for etching a wide range of materials. Its high-precision control systems, enhanced automation, and its onboard particle control machine help reduce product contamination and optimize processing results. RIE-200IPC is ideal for low to high-volume processing, providing high-quality, repeatable results.
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