Used SAMCO RIE-200L #9157970 for sale

Manufacturer
SAMCO
Model
RIE-200L
ID: 9157970
Vintage: 1999
Etcher 1999 vintage.
SAMCO RIE-200L is a radio frequency (RF) etcher/asher specifically designed to produce high quality, rapid results when etching or ashing various substrates. RIE-200L is equipped with an advanced ion source and a powerful cooling load capacity, enabling it to operate in pulsed mode for longer periods of time. The thermal management of the etcher is also improved thanks to the addition of a water cooling plate which eliminates any possible heat buildup. SAMCO RIE-200L is built with a compact design and user-friendly components and layout, making it the preferred choice of many research and industry engineers. The etcher comes with an adjustable frequency output, providing the exact degree of power with automated precision. The control box has a high-resolution LCD display with various parameters that can be adjusted quickly and easily. Additionally, the system comes with safety interlock systems and an emergency off switch, guaranteeing minimal risks during operation. RIE-200L is capable of operating with three gases - O2, CF4, and Ar - as well as a variety of substrates including aluminum, gallium indium (GaIN), gold and doped silicon. The system supports an impressive etching rate of up to 11.7nm/min, with a shallow or deep etching accuracy of 1~3 microns and 6~30 microns respectively. Furthermore, the etcher comes with a built-in exhaust filter for collecting particles and collecting any waste generated from processing. As a versatile and reliable etcher, SAMCO RIE-200L is a premium asset for a variety of industries and applications. Its high etching rate and accuracy makes it an ideal choice for producing high quality parts for use in various electronics or mechanical industries. The combination of automated precision and adjustable frequency output will certainly enable engineers to explore new technologies and develop groundbreaking products.
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