Used SAMCO RIE-300NR #9234636 for sale
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SAMCO RIE-300NR is an etching and ashing equipment designed for use in integrated circuit (IC) production, micro-electronics and related applications. The system offers reliable and precise chemical etching and ashing of various substrates. SAMCO RIE 300 NR can accommodate a range of 4" to 12" (100mm to 300mm) wafers in its cassette style etching and ashing chamber. This is facilitated by RIE-300NR's combination of a floating stage and automated valve control. The chamber environment is controlled by a built-in flowmeter unit, which is specifically designed to accurately adjust the gas flow. RIE 300 NR can handle a wide range of etch and ashing conditions. It has been tested for etching and ashing of aluminum, tungsten, polysilicon, quartz and other semiconductor materials using gases such as CF4, SF6, NF3, CDA, and Oxygen. The machine has been designed for operation at the high temperatures of up to 660°C as well as at sub-zero temperatures of up to -100°C. This is facilitated by the tool's built-in cooling capability through liquid nitrogen. SAMCO RIE-300NR is equipped with an advanced software control asset, designed to ensure optimal control of etching/ashing. This allows automated recipe control integrated into the model, making for more efficient and accurate etching and ashing processes. This advanced software control equipment also allows for programmable shutters to meet cleanliness standards. In addition, SAMCO RIE 300 NR boasts a built-in vacuum pump and vent system, designed to ensure a clean process chamber atmosphere. This unit is reportedly able to achieve vacuum levels below 10-6 Torr. This ensures continuous operations without contamination. The machine is constructed using industrial grade components, designed to handle the rigorous conditions of etching and ashing processes in a laboratory setting. RIE-300NR also has a wide range of monitored safety features, designed to keep the user and environment safe. RIE 300 NR Etching and Ashing Tool is a reliable and precise etching and ashing solution for integrated circuit production. It is adept at handling a wide range of etching and ashing conditions, as well as offering automated software control and vacuum levels of 10-6 Torr. With its industrial grade components and safety features, SAMCO RIE-300NR provides a reliable and safe etching and ashing solution for laboratory applications.
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