Used SAMCO RIE-300NR #9236887 for sale

SAMCO RIE-300NR
Manufacturer
SAMCO
Model
RIE-300NR
ID: 9236887
Reactive Ion Etching (RIE) system.
SAMCO RIE-300NR etcher/asher is a high-performance etching and ashing system designed for etching/ashing of various materials, including glass, stainless steel, soft metals, and plastics. SAMCO RIE 300 NR is designed with a dual chamber design, so it can be used for both etching and ashing processes. The upper chamber houses an electrode for etching, and the lower chamber houses a heater for ashing. The etching chamber features a dielectric insulation to ensure precise control over etch parameters, and a vacuum system to keep the etch process clean. The ashing heater chamber has a temperature range of up to 450°C, which provides accurate and repeatable results. RIE-300NR also features a full touch-screen user interface for easy operation and monitoring, allowing users to create and store recipes and parameters for later use. The interface also provides multiple safety features to ensure that the operator is not exposed to any dangerous materials during the etching process. The etch uniformity and speed of RIE 300 NR is also impressive, providing a production rate of up to 300 wafers per hour with repeatable uniformity of +/- 0.5µm. The process can also be expanded using the optional VDE-8 dielectric HV etch chamber in order to extend the range of material types and sizes that can be etched/ashed. Finally, SAMCO RIE-300NR is also compatible with many metrology systems, so that users can obtain fast, accurate, measured data on their wafers. This allows users to quickly make adjustments to their recipes, and produce consistent, quality parts on a consistent basis. Overall, SAMCO RIE 300 NR is a powerful and reliable etcher/asher that provides a complete etching solution for a variety of materials, with a high production rate and accurate uniformity. Its ease of operation and compatibility with metrology systems make it a perfect solution for any manufacturing or research-focused lab.
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