Used SAMCO RIE-331iPC #293607298 for sale

Manufacturer
SAMCO
Model
RIE-331iPC
ID: 293607298
Vintage: 2012
Dry etcher (2) Pumps Circulator Molecular Pump PC 2012 vintage.
SAMCO RIE-331iPC is a dry etching / ashing equipment that is specifically designed for precision etching and ashing of materials such as oxide films, silicon, metals, and glass. The machine is engineered to provide precise, repeatable results while providing a safe and clean process with low gas consumption. The system utilizes an RF power generator and two independent plasma sources, each capable of delivering up to 200 Watts of power, creating an efficient and economical process. The unit is designed with the user's safety in mind, with a comprehensive safety machine featuring a safety valve, safety gas shut-off, automatic evacuation and other features. The process chamber is also designed to ensure a low-pressure process, providing a safe environment to work in. An additional feature is the in-situ process monitoring, which allows users to monitor the process parameters in real time and adjust the process settings to achieve the desired results. The tool is also highly flexible, with a wide range of gas configurations and a wide range of process pressure levels, enabling users to adapt the process to the material being etched or ashed. The machine has an integrated, automatic gas mixing asset, allowing for both single-phase and multi-phase etching. This model also allows for a high degree of process control, enabling users to precisely program the etching process. The equipment also includes a vacuum wafer transmission system, allowing users to safely and quickly change wafers during a process run. Additionally, the unit offers several additional features that make it even more versatile and efficient, such as automated etch rate compensation, automatic request of information, automatic gas recipe programming, and automated monitoring and control of the process. RIE-331iPC also offers an advanced user interface, enabling users to both monitor and control the process in an easy and intuitive way, with minimal input from the user. In summary, SAMCO RIE-331iPC is an advanced yet cost-effective etching/ashing machine that provides precise and repeatable results while keeping users safe and the process clean. Its range of process parameters and features make the tool highly flexible and efficient, while its advanced user interface makes controlling and monitoring the process straightforward and hassle-free.
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