Used SAMCO RIE-400iPB #293682703 for sale
URL successfully copied!
Tap to zoom
ID: 293682703
Vintage: 2009
Dry etcher
Reaction chamber Inner diameter: φ 320 mm x φ 37 mm
Viewport (one on the right side)
Lower electrode temperature: Constant temperature circulation device (20°C~25°C) Rubber heater
2-turn coil lower electrode: φ106 mm
Gases: CHF3, O2, Ar, C4F8, SF6
ICP: 13.56 MHz (max 1 kW), bias 13.56 MHz (max 300 W)
Power supply: 200 V, 60 A, 3 Phase, 60 Hz
2009 vintage.
There are no reviews yet