Used SAMCO UV-300 #293757915 for sale

SAMCO UV-300
Manufacturer
SAMCO
Model
UV-300
ID: 293757915
Vintage: 1989
UV Ozone cleaning system 1989 vintage.
SAMCO UV-300 is an etcher and asher developed by SAMCO Inc. to provide superior surface preparation for microelectronic applications. This unique SAMCO UV 300 model utilizes high-energy, UV rays to remove oxides and contaminants from a variety of surfaces including multilayer thin films. UV-300 is designed with an automatic susceptor lift equipment to precisely control the etching process, ensuring consistently uniform etching depths. The system features ECD (electronic control display) utilizing an intuitive LCD touch screen that accurately sets and displays process time, avoiding the potential for over-etching of sensitive substrates. UV 300 also features a maximum pressure capability of up to 1.2 GPa, making it perfect for the preparation of high temperature and ultra-low voiding applications. The performance benefits of SAMCO UV-300 are due to the use of quartz and boron nitride windows, which protect the exposed components while their inert nature minimizes contamination. Additional features of SAMCO UV 300 include an adjustable temperature control for substrate vaporization, a chamber window size of 42 cm x 42 cm, optional water and nitrogen cooling to reduce unit heat load, precise timing of exposure cycles to optimize etch uniformity, and a vacuum of 10-3 Torr. Combined with standard tooling accessories, such as the HyperPrepTM etch mask, UV-300 provides optimal process uniformity and repeatability while ensuring reliable device performance. The etch rates are instantaneous, so no mask wash step is required, allowing users to easily achieve high device yields. The high power of UV 300 allows for faster throughput, reducing processing times while maintaining high-quality results. SAMCO UV-300 is the perfect etching solution for users looking for a reliable, efficient machine.
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