Used SCHMID Combi Line #9237970 for sale

SCHMID Combi Line is a multifunctional etcher / asher designed to perform both plasma etching and ashing of wafers without the need for manual intervention. The equipment consists of a single, modular unit combining an etching chamber, process gas lines, a vacuum equipment, and an in-situ plasma source. The etching chamber of Combi Line is equipped with internal electrodes and a charged particle beam that produces unbiased ionized gas at high temperature, minimizing etch damage and improving process control. The adjustable etching process parameters, such as pressure and process gas flow, are controlled by a programmable logic controller (PLC). The unit is designed to handle up to six wafers in parallel and is compatible with all standard wafer sizes. The wafer is heated by the pad attached to the upper disk, allowing precise manual adjustment of the temperature. The in-situ plasma source in the center of the etching chamber is removable and programmable for different etching recipes. The asynchronous pressure regulation system (APRS) in SCHMID Combi Line can be automatically adjusted to control the pressure in the etching chamber. It allows the unit to etch without the use of an external pump, reducing both cost and time. The unit's rotary ashing unit offers the advantage of uniform heating of the wafers during the ashing process. This reduces the thermal budget, preventing damage to sensitive layers or structures from thermal diffusion. The modular design of the equipment facilitates quick maintenance and replacement. The entire machine is built on a compact platform and utilizes a single airlock for fast transfer of the wafers. The PLC is equipped with a Graphical User Interface (GUI) that provides an easy to use interface for entering and running etching and ashing recipes and monitoring the status of the tool. Overall, Combi Line provides extended etching and ashing capabilities in a single unit. The equipment offers increased throughput, improved process control and precision, as well as reduced cost of ownership.