Used SCHMID Infinity Line #293605245 for sale

SCHMID Infinity Line
ID: 293605245
Substrate cleaning system.
SCHMID Infinity Line etcher / asher is a equipment designed for the advanced processing of a variety of industrial materials. This system can be used for a wide range of applications, from simple etching and ashing processes to more complex surface micro-structuring operations. Infinity Line unit consists of two main modules; a single wafer etching/ashing processor and an optional thermal treatment unit. SCHMID Infinity Line etching/ashing processor is a compactly designed machine with a user-friendly graphics user interface (GUI) and a simple process control function to ensure maximum repeatability and reproducibility. This tool comprises of a fast scanning etch / ash chamber as well as a separately housed programmable, triaxial (X, Y, and Ω) controller with a sample positioning accuracy of less than 1 μm. This asset enables users to precisely control the etching/ashing process parameters such as temperature and power of the etching/ashing mechanism. In addition to the single wafer application, Infinity Line is capable of handling 25 wafers in the batch mode. A built-in memory storage enables users to store and rerun recipes for fast and trouble-free processing. SCHMID Infinity Line is powered by a frequency-controlled drive motor, which allows for process speed control and precision. In addition, a Frequency Modulation (FM) measurement is available to monitor process progression and to detect aberrations in realtime. The optional thermal treatment unit, which is connected to Infinity Line etching/ashing processor, allows users to pre- and post-treatment the substrate. This model is equipped with a non-contact, non-thermal, pyrometer to ensure precise temperature control and uniform thermal treatments. This unit also allows users to use several thermal treatment gases, such as Ar and N2, to accurately transfer heat to the substrate. The overall design of SCHMID Infinity Line etcher / asher is highly powerful, abled to process a wide range of materials, and perform highly precise etching and ashing operations. This equipment ensures repeatable etching/ashing results and provides the optimal temperature management for thermal treatments.
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