Used SCI AUTOMATION CAM2 #9249239 for sale

SCI AUTOMATION CAM2
Manufacturer
SCI AUTOMATION
Model
CAM2
ID: 9249239
Vintage: 2009
Plasma cleaning systems 2009 vintage.
SCI AUTOMATION CAM2 is an advanced etching/ashing equipment designed for rapid high quality microfabrication with a small footprint. It has a modular design that allows for flexibility and customization depending on the user's needs. CAM2 includes a wetbench for chemical processing, as well as an experimental chamber for ashing. Additionally, it is capable of performing well-controlled maskless and conventional lithography, wet jets, and chemical vapor etching (CVE). SCI AUTOMATION CAM2 is driven by an intuitive ten-touch LCD screen, with a graphical user interface (GUI) that allows users to interact and control the system with ease. It has a variety of process parameters configurable from the GUI, letting the user customize the process to their desired specifications. The integrated design reduces external instrumentation, and the GUI saves time in setting up the process parameters. The wetbench includes a chemical reservoir that is temperature controlled and heated to the desired temperature for etching and ashing. The reservoir is attached to an automated liquid handling unit so that chemicals can be accurately delivered and mixed in the appropriate ratios. Other components of the wetbench include a deionized water tank to prevent corrosion, recyclable waste containers, a safety panel, and an exposure chamber with an ultraviolet source. The exposure chamber also has integrated sensors to monitor the process, such as temperature and pressure. The ashing chamber has an enclosed interior that is designed to provide a safe and controlled atmosphere. It has an exhaust machine to protect workers from hazardous materials, adjustable fan speeds, and a temperature control tool to maintain the ideal temperature for the desired process. The ashing chamber is equipped with a quartz crucible for holding wafers and a dual-arm robot for etching and moving wafers. CAM2 also features automated spare parts handling, quick sample/substrate changeover, and fast thermal processing time. It also has an array of safety features such as a temperature shutdown asset, emergency stop button, and a fire suppression model. Overall, SCI AUTOMATION CAM2 is an advanced and user-friendly etching/ashing equipment that features an integrated design and robust safety features. The intuitive LCD touchscreen and customizable process parameters offer users the flexibility to tailor a specific process to their application. With its extensive capabilities and reliable performance, CAM2 is an ideal choice for demanding microfabrication work.
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