Used SEMITOOL Excalibur 2000 #9226634 for sale

SEMITOOL Excalibur 2000 etcher/asher is an advanced piece of equipment for chemical removal or deposition of materials. It is a automated semiconductor, wafer or die level process used for both etching and ashing methods of fabrication of semiconductor integrated circuit (IC) chips. Excalibur 2000 equipment offers ultimate flexibility in wafer size and substrates types; all types of semiconductor wafers such as Silicon, Gallium Arsenide, Silicon on Sapphire, and glass-ceramic substrates can be handled. SEMITOOL Excalibur 2000 system is often used in semiconductor compound semiconductor process labs. The etcher/asher includes a robot arm with an application paddle to homogeneously and automatically distribute the process chemicals to the wafers in the process chamber. The robot arm is compatible with standard pod carriers; it is also equipped with a synchronization control board that can be used to adjust the number of robot movements and recipes per wafer. The robot arm is also connected to a synchronization control board for process chemistry delivery, ensuring consistency and accuracy of the chemical processing. Excalibur 2000 unit comes with an integrated, state-of-the-art Excalibur optical machine, which allows precise monitoring and control of the etching/ashing processes. The optical tool includes an infra-red scanner, an optical imager, an optional photoresist inspection head, and a collimated-optical sensor with a variably adjustable asset of fiber optics that provides real-time control of the etching and ashing processes. It also offers adjustable parameters such as size, position, thickness, and shape of the etched features on the wafers. SEMITOOL Excalibur 2000 model also features an advanced multi-point RF source for etching with adjustable power and type of RF waveform. It also features a high speed, high precision imager for application of protective layers for advanced processes such as Plasma Enhanced CVD. Finally, Excalibur 2000 equipment is based on a user-friendly software platform that allows easy programming and control of the etching/ashing processes via a touchscreen control interface. Control parameters such as recipe number, wafer size, gas flow, temperature, pressure, RIE parameter, RF parameter, and cooling time are all adjustable from the interface. SEMITOOL Excalibur 2000 etcher/asher is an efficient and advanced process tool for fabrication of IC chips. Its features enable precise, accurate, and consistent etching and ashing processes with the ultimate flexibility in wafer-size and substrate types. Its infrared scanner and optical imaging system provide advanced monitoring of the etching and ashing processes, while the integrated software platform allows for easy programming and control.