Used SEMITOOL Excalibur 2000 #9250097 for sale

SEMITOOL Excalibur 2000 is a state of the art, high performance etcher and asher for the semiconductor industry. It offers the highest process uniformity and lowest total cost of ownership. Excalibur 2000 has an advanced automated process control equipment, highly optimized to minimize substrate defects, reduce particle contamination and ensure process compliance. It provides advanced etching capability with the ability to precisely control masking, etch depth, etch speed, and flatness of the substrate. It can etch and deposit both dry and wet media and provide unmatched process repeatability with outstanding accuracy. SEMITOOL Excalibur 2000 is equipped with a dynamic chamber design that yields an unrivalled thermal uniformity of ±1°C/min along the entire substrate range, ensuring consistent process results. It has built-in process definition and control, providing the flexibility and accuracy for high yield, high throughput semiconductor production. To ensure consistent results, Excalibur 2000 uses superior high purity processing gases which can be regulated and metered precisely for optimal process control. It features an advanced cooling system, in-situ temperature and pressure sensors which can be monitored in real time and significantly reduce gas loss. Advanced process control monitoring and reporting tools, such as a lifetime monitor for RF generator, allow users to monitor critical parameters and quickly address process issues. An integrated power supply-monitoring unit permits users to continuously monitor generator output power, alerting when an issue arises. SEMITOOL Excalibur 2000 is designed to provide producers with reliable results, lower cost of ownership, and the highestthroughput performance. Its advanced recirculation machine monitors and cleans the process chamber and pumps for particle buildup and contamination. With its process accuracy and efficiency, Excalibur 2000 offers the highest throughput per square inch in the industry for etch and asher process steps.