Used SES Sugai #9192009 for sale

SES Sugai is an advanced etcher/asher that is designed for high-precision etching and ashing of wafers. It utilizes several specialized processes and features to ensure accuracy and efficiency. First, Sugai is equipped with a high-speed XY stage and a motion control equipment that provides fast and precise movement of its wafer carriers. This allows the etcher/asher to quickly and accurately scan the target wafers. The stage is also equipped with an advanced laser system that is used for precise alignment of the wafer carrier, as well as to adjust the speed and resolution of the processes. Second, SES Sugai uses a specialized gas delivery unit that enables high-precision etching and ashing. The gas delivery machine provides a precise composition of oxygen, Ar, N2, and other gases, while ensuring the specified gas flow rate and pressure. This tool also prevents contamination of the gas delivery lines and ensures efficient etching and ashing of the wafers. Third, Sugai features a plasma source that is used for direct Etching and Ashing processes. This plasma source generates a uniform, low-temperature plasma that is highly suitable for etching and ashing. The high-energy density of the plasma source further enables higher etching rates and improved process speeds. Finally, SES Sugai is equipped with multiple sets of process sensors, which are used to monitor the various parameters of the etching and ashing processes. These sensors are extremely accurate and allow for precise control of the wafer's heating and cooling rates, pressure, and gas flows during the etching and ashing process. Overall, Sugai is an advanced etcher/asher that is designed to provide high-precision results for the etching and ashing of wafers. Its specialized features and capabilities make it a powerful tool for wafer processing applications.