Used SEZ / LAM RESEARCH 100 #9211219 for sale

SEZ / LAM RESEARCH 100
ID: 9211219
Single wafer etcher.
SEZ / LAM RESEARCH 100, also known as an etcher/asher, is a modular, versatile, chemical processing equipment designed for in-line or batch processing of high throughput substrates. This system is ideal for surface cleanliness, wafer surface mount component attach / detach, wafer bonding, device encapsulation, ceramic coatings, and die attach. SEZ 100 is a versatile unit that can perform many different applications including etching and ashing. The machine has the ability to process substrates up to 6" in diameter and of thickness down to 25 microns. It boasts an easy-to-use graphical user interface and provides accurate process control utilizing high accuracy thermocouples and miscellaneous sensing items. The tool is designed to provide a complete, reliable and repeatable etch/ash process. LAM RESEARCH 100 is equipped with many features that enable it to meet the demands of a wide range of applications. It has several modules for chemical delivery, including Acutherm, a specialty delivery asset for corrosive liquids, and Flexiload, an adjustable chemical injection model. The equipment also has several options for temperature control including precision temperature control, programmable temperature ramping, solvent overrun, heat soak, and auto-thermocoupling. In addition, the system has a built-in recirculation capability so that bath life is extended and the process is repeatable. 100 is designed as an all-in-one solution for etching and ashing and can be easily integrated into existing production lines. The unit is capable of etching/ashing with consistent results and minimal downtime due to its modular and versatile design. Its advanced features also help minimize chemical usage and labor requirements, while enabling companies to produce high-performance products. SEZ / LAM RESEARCH 100 is a reliable, powerful, and cost-effective choice for any in-line or batch processing of high-throughput substrates. With its user-friendly features and versatile modules, this machine is an ideal choice for companies looking for a reliable tool for etching/ashing their substrates.
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