Used SEZ / LAM RESEARCH 304 #293622221 for sale

SEZ / LAM RESEARCH 304 is a batch-style precision wet etch and ashing equipment. It is designed to provide a combination of fast, safe, and accurate recipes for precision etching of a wide range of substrates, semiconductor wafers, metals, and other materials. SEZ 304 is equipped with a trimline platform which can accommodate up to four large-format substrates (typical 6" and 8" substrates) and up to four racks of substrates in the wider formats (10" and 12"). The platform features a wide range of process chamber sizes and etch rates, allowing for full variability of processing times and etch rates. LAM RESEARCH 304 also features a wide range of programmable recipes for etching and ashing rates, allowing for reproducible and reliable batches. 304 has a built-in gas panel, allowing for complete control of the process chamber's atmosphere. In addition, SEZ / LAM RESEARCH 304 features an integrated clean-in-place (CIP) system to facilitate a rapid and efficient cleaning of the etch/ash chamber and process lines. SEZ 304's control unit provides a comprehensive process automation solution and allows for user programming and control of a variety of process parameters. LAM RESEARCH 304's intuitive and user-friendly graphical interface allows operators to quickly and easily program and monitor etch/ash processes and allows for on-the-fly troubleshooting and monitoring. 304 also features a wide range of safety features, including two levels of vacuum interlocks to ensure safe operation, a pressure monitor to monitor chamber pressure, a temperature monitor to ensure proper substrate heating and cooling, and a process monitor to ensure proper etch rate and process times. SEZ / LAM RESEARCH 304 also has a variety of user-selectable alarm settings, allowing operators to tailor the alarm settings per their specific process needs. Additionally, SEZ 304 incorporates a quartz-free etch process which eliminates the introduction of metallic elements into the etch chamber and thereby reduces the risk of contamination or damage to substrates. In summary, LAM RESEARCH 304 is a reliable and versatile precision wet etching and ashing machine that provides users with precision etch and ash rates and a comprehensive process automation solution. 304 offers a wide range of process chamber sizes and etch rates, an intuitive graphical user interface, and built-in safety features to ensure safe operation and process integrity. With its robust performance and reliability, SEZ / LAM RESEARCH 304 is suitable for industrial research, production, and educational applications.