Used SEZ / LAM RESEARCH 304 #9224043 for sale

SEZ / LAM RESEARCH 304 is an asher/etcher equipment ideal for high-performance semiconductor processing. It features advanced LAMPAR™ technology that provides a high level of performance, productivity, fidelity, and uniformity. SEZ 304 integrates etching, deposition, and resist/dielectric stripping processes using LAM-specific plasma-enhanced chemical vapor deposition (PECVD) and etching technologies. The system features a 17-inch throw-away susceptor and a manually adjustable quartz ladder. It also has an upper-level vacuum unit that enables precise and repeatable etching processes. In addition, LAM RESEARCH 304 offers a precise time-based process control machine with a repeatability of ± 0.001°C/min. This is essential for critical etching applications in order to ensure product quality and reliability. 304 includes a high-temperature uniformity package that provides precision control of both local and global temperature profile. This feature creates an even, even thickness and uniformity across the substrate which leads to better device performance. SEZ / LAM RESEARCH 304 is also equipped with an advanced LAMResearch™ Process Center for complete process control and data logging. This allows users to monitor chamber conditions to maximize tool performance, maximize fabrication yield, and improve process control. SEZ 304 utilizes advanced LAMPAR™ technology to provide an ultrahigh-resolution profile and uniformity of etching processes. This provides the best substrate etching quality and reproducibility of etch results. Additionally, LAM RESEARCH 304 utilizes a proprietary LAM-specific process, driven by a state-of-the-art PLC controller. This asset has the capability to detect and prevent arcing events, minimize the likelihood of drift, and remain highly stable over time. The LAM 304 has a proven history of successful etching applications in the semiconductor industry and is well suited for mass production as well as research and development. Additionally, SEZ / LAM RESEARCH 304 is easy to operate and adjust, and can work with a variety of chemicals and substrates. Its advanced LAMPAR™ technology, advanced process center, and high-temperature uniformity package make SEZ 304 an ideal tool for semiconductor fabrication.