Used SEZ / LAM RESEARCH 323 #293632548 for sale
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ID: 293632548
Wafer Size: 12"
Vintage: 2003
Spin processor, 12"
Controller
Carrier station block, (4) FOUP
Process block
AC Power box
(2) Etchers
CDU
Temperature Control Unit (TCU)
Solvent supply system: (2) Tank auto supply systems with CSS
Direct drain
Heater tank
(4) SLQ-QT500 Flow meters
2003 vintage.
SEZ / LAM RESEARCH 323 etcher/asher is an advanced piece of industrial equipment used for etching and ashing printed circuit boards, MEMS devices and other semiconductor components. It is designed for fast and precise removal of metal deposits and other residue on the surface of the board, using a specialized etching solution combined with a high-speed, vacuum-driven vapor-hydrogen peroxide asher. The RESEARCH SEZ 323 etcher/asher features a number of advanced features and capabilities designed to maximize the accuracy and speed of the etching process. It features a patented three-sided, hermetically sealed process chamber, powered by a 500W source to ensure consistent performance. The built-in high speed dry etch/clean and liquid etch/clean processes enable rapid removal of metal, resist and other material on the surface of the board. The etch/clean process achieves consistent and repeatable results, while the liquid etch/clean process is capable of removing extremely thin layers of metal and resist. The RESEARCH LAM RESEARCH 323 also supports micropoint technology, enabling wafer-level etching and ashing. The high speed asher module utilizes H2O2 plasma to achieve high throughput levels with excellent control and accuracy. The RESEARCH 323 also boasts its patented Integrated Surface Contamination Control System (ISCCS), which tracks the contaminants and adjusts etching/ashing parameters in real-time to ensure uniformity of the deposit. It also features a built-in water backflow filter for easy maintenance and reliability. In addition, the RESEARCH SEZ / LAM RESEARCH 323 has a variety of options and accessories available for customizing users' machining operations. It has built in communication ports for automated settings and real-time status monitoring. It is highly configurable and can adapt to various production requirements and process conditions. Furthermore, SEZ offers a wide range of excellent support services to ensure users get the most out of their etch/asher. For its outstanding performance, consistent accuracy and ease of use, SEZ 323 etcher/asher is a great choice for industrial-level etching and ashing operations. It is a reliable, efficient and cost-effective solution that meets the needs of PCB designers and semiconductor engineers.
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