Used SEZ / LAM RESEARCH 323 #9224055 for sale

SEZ / LAM RESEARCH 323 is an highly accomplished etcher/asher specifically designed for use in a variety of production applications. This model is equipped with an advanced layer transfer system that provides high precision for advanced processing. It is designed for direct plasma etching of high aspect ratio via layers from polymer thin film, resists and other materials. SEZ 323 is built to extremely exacting specifications and capable of achieving profile accuracy from 0.1 microns to 100 microns when used with a compatible jig and bracket. LAM RESEARCH 323 provides a fully automated process with a large wafer chuck for up to 8" wafers. The wafer chuck is equipped with RF driven z stage, a mechanical side stage, a shield holder and two lift pins. The mechanical side stage facilitates single or thin-layer transfer while the shielding holder provides uniform plasma energy distribution. The Lift Pin System accurately aligns substrates and eliminates window shifting on sensitive materials. 323 features an advanced gas-assisted etching system that eliminates the need for manual intervention and reduces contamination. The highly efficient process utilizes plasma to breaks down the polymer bond layer and disperse it in the atmosphere for quick and easy removal of patterns. During nuclear etching, the process chamber maintains a controlled atmosphere that produces excellent micro-etching of ultra-thin layers. SEZ / LAM RESEARCH 323 has an intuitive user interface that allows operators to configure the machine for process speed, chamber vacuum and etch rate. In addition, real-time pressure and gas flow monitoring allow operators to adjust conditions according to the needs of specific substrates or pattern designs. The etcher/asher also has a reduced footprint and buffer chamber size, allowing it to be easily incorporated into space-restricted systems. SEZ 323 etcher/asher is an excellent choice for a variety of production applications, providing operators with unparalleled performance and reliability. Its advanced features allow for intense levels of customization, enabling users to tailor the machine to their specific process requirements. With reliable operation and accurate layer transfer, LAM RESEARCH 323 is an essential tool for high-volume production, prototype production and research.