Used SEZ / LAM RESEARCH DV-34 BF #9389718 for sale
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ID: 9389718
Wafer Size: 12"
Vintage: 2005
Single wafer etcher, 12"
Air valve missing
Loadport
Chamber
Robot
Controller
2005 vintage.
SEZ / LAM RESEARCH DV-34 BF is a powerful, high-precision, reactive-ion-etching (RIE) asher. It is designed to achieve the highest levels of efficiency and reliability to meet stringent industrial standards. The equipment combines superior technology and features with exceptional power and accuracy, resulting in a tremendous increase in productivity for etching processes. SEZ DV-34 BF is capable of processing wide variety of materials including silicon, silicon dioxide, and quartz. The system is designed with an innovative dual-beam delivery unit to enable precise control with optimal performance and repeatability. This means that the component receives evenly spaced and calibrated pulses of energy that ensure accurate etching for each and every workpiece, enhancing process repeatability and stability. The machine also offers a wide range of etch technologies ranging from microlithography to advanced etching, making it the perfect solution for a variety of etching needs. The tool supports up to four different beams and has single port processing with a total process cycle time of only 19 minutes. It also offers multiple power levels of up to 250 watts, providing users with the capability to achieve the highest etch rate in the industry. Other features of the asset include a super high-resolution digital imaging model with a 95 nm resolution scanner and a low temperature etching mode that allows for a safe low-temperature etching of a wide range of materials. The chain-load productivity feature further enhances process accuracy and throughput, enabling synchronized processing of multiple workpieces at a time. LAM RESEARCH DV-34BF achieves the highest precision etching results with its built-in layer-by-layer deep-trench etching tool and through an AutoTune feature that adjust the etch depth by measuring the sample etched thickness. This ensures accuracy, uniformity, and repeatability in etching processes. The equipment also has a powerful data processing processor controling the etching parameters in order to optimize it for the user's specific application. SEZ / LAM RESEARCH DV-34BF is an ideal choice for etching tasks with its superior technology, intuitive user-interface, and powerful features. It is perfect for high-volume and complex etching applications, enabling users to achieve the highest level of precision while working with a wide range of materials.
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