Used SEZ / LAM RESEARCH DV-34 #293652633 for sale

SEZ / LAM RESEARCH DV-34
ID: 293652633
Wafer Size: 8"- 12"
Single wafer etchers, 8"- 12" (4) Chambers.
SEZ / LAM RESEARCH DV-34 is an advanced plasma etcher/asher that provides effective and uniform material removal of organic and inorganic materials. It is a versatile, cost effective, and reliable etching solution for various applications. The unique design of the etcher allows the user to adjust the etch rates for various materials. The unit comes equipped with a 7.6 inches wide chamber, allowing it to etch multiple pieces simultaneously. The unit also features a perforated holder assembly that provides uniform etching without the need for additional fixtures. Its spiral flow gas delivery system creates a continuous uniform flow of the desired etch chemistry through the etch chamber. The septumless design eliminates potential contamination sources from the etch chamber and allows operation up to 10-4 torr. SEZ DV-34 is designed with user safety in mind and contains two vacuum pumps that improve vacuum stability while granting users full control over the chamber evacuation and aiding in the repeatable process. In addition, the wafer motion system inside the chamber helps prevent overheating, which can harm delicate substrates. The wafer motion system eliminates edge effects often caused by temperature gradients. In addition, LAM RESEARCH DV-34 is equipped with a comprehensive touch screen interface that allows the user to easily program and monitor the etching process. Programming the process on the touch screen is simple and intuitive, allowing a wide range of custom parameters and programmable etching recipes. The user can choose from several selectable process recipes, cut etch times, and eliminate edge effects. Overall, DV-34 is an advanced and reliable etcher/asher that can provide precision etching across a wide range of materials. Its multiple user-friendly features make it an ideal solution for various etching applications.
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