Used SEZ / LAM RESEARCH DV-34 #293663119 for sale
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SEZ / LAM RESEARCH DV-34 is a plasma etcher/ascher used for wet and dry processing steps such as etching, ashing, and anodization of semi-conductors and other materials. SEZ DV-34 is a plasma etcher/asher designed for use in high-throughput processing environments. It is capable of processing substrates up to 305mm in diameter, and can achieve surface roughness of 1.0 Angstrom RMS or better. LAM RESEARCH DV-34 is capable of sub-micron resolution and features a wide range of available chambers and processes. The chamber is separated into two its own Aluminum, rotary, CVD process chamber and source chamber. These chambers provide an ideal environment for processes such a etching, ashing, and anodization. It also features an advanced plasma delivery design which provides for improved uniformity and repeatability of etch processes. DV-34 is equipped with many features to ensure safety and repeatability of process results. The etcher/asher's advanced controller allows the user to control multiple parameters and programs. The controller also includes a programmable memory that can store up to 99 programs with different etch parameters. This allows for user optimization of the etch parameters in order to achieve a desired result. SEZ / LAM RESEARCH DV-34 has a unique mechanical design that allows for precise but gentle clamping of the wafer. This increases the lifetime of the systems by decreasing wear and tear on components. It also features a dual-bay door mechanism with a safety shutter, which ensures secure, dust-free operation. SEZ DV-34 is designed with user convenience in mind. The chamber is equipped with a high-efficiency condenser, which reduces condensation of chemicals onto the wafer. The etcher/asher also features an automatic gas shut-off for increased safety and reliability. Finally, LAM RESEARCH DV-34 is outfitted with a warning system that alerts the user of any potential hazards. DV-34 uses dependable hardware and software components from leading manufacturers to ensure reliable and consistent performance. The etcher/asher utilizes a high-speed proprietary video feedback system to adjust the etch parameters in real time and ensure repeatable results. With the benefit of high-efficiency processing, advanced features, and user-friendly design, SEZ / LAM RESEARCH DV-34 from SEZ is ideally suited for a variety of wet and dry etching, ashing, and anodization processes. It is a valuable tool for research and development of semiconductor and other materials processing.
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