Used SEZ / LAM RESEARCH DV-34 #293754180 for sale

SEZ / LAM RESEARCH DV-34
ID: 293754180
Wafer Size: 8" - 12"
Vintage: 2007
Single wafer etcher, 8" - 12" (4) Chambers 2007 vintage.
SEZ / LAM RESEARCH DV-34 is a state-of-the-art etcher/asher that can be used for the production of high-performance, advanced materials. It is designed to provide maximum flexibility and performance in the processing of both organic and metallic materials. SEZ DV-34 etcher/asher is built with a high-resistance quartz tube and furnace, an automated gas delivery equipment, and a precision-controlled etch/ash system. The quartz tube and furnace are constructed with a superior thermal insulation for greater efficiency and process repeatability, while the automated gas delivery unit provides up to 10 different process gases in the desired ratios and flows. The etch/ash machine provides fine control through the use of programmable capacitively coupled momentary. This ensures that the etch/ash process is very precise and repeatable. LAM RESEARCH DV-34 also has a high-pressure reactive ion etch (RIE) feature that enables producers to etch through thicker, harder materials with high precision. This comes in handy when it comes to producing components with fine N-shapes, thin walls, or other detailed feature. RIE also allows etching of materials such as nitride, polysilicon, and amorphous silicon. DV-34 etcher/asher also comes with reactive gas activation, which helps to increase the process rate and uniformity of etching. This technology also helps reduce surface roughness and the amount of waste generated by the etching process. Additionally, SEZ / LAM RESEARCH DV-34 is equipped with a number of advanced monitoring and diagnostic tools. These include audiovisual displays, temperature control, dimensional contouring capability, and process parameter trend monitoring to ensure optimal etch/ash process repeatability and yields. This etcher/asher is perfect for both commercial production and R&D laboratory use. It is ideal for the processing of advanced materials in multiple formats including substrates, wafers and panels. SEZ DV-34 is truly the gold standard for etching and ashing processes.
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