Used SEZ / LAM RESEARCH DV-34 #293758354 for sale

SEZ / LAM RESEARCH DV-34 is an innovative etching and ashing equipment that provides precise, repeatable results for a wide variety of processing steps related to semiconductor manufacture. The system's chamber is a compact, cylinder shaped design that stands at 1.2 meters tall with a 40cm diameter. It is tailored to process small batches, making it ideal for prototype development and research labs. It is also capable of handling high volume production jobs. SEZ DV-34 features pressure, temperature, and gas control that allows for precision etching and ashing of a variety of materials, including silicon, gallium arsenide, gallium nitride, and aluminum. The pressure in the unit is easily controllable, with a range of 5 to 20 Torr and a variation limit of 0.02 Torr. The machine also features a reactor tilt angle adjustment, allowing users to precisely control etch rates, as well as a fully integrated gate valve for recipe matching. The tool further supports multiple gas sources, including Argon, Oxygen, CF4/CHF3, NF3, and Cl2. It has a line by line gas flow monitor for gas monitoring at the inlet (I-type) and outlet (F-type). It also features a range of sensors, including a carrier mass flow rate monitor/meter, gate valve pressure monitor, and pressure regulation control measurements in the heater assembly. The process control software for LAM RESEARCH DV-34 is intuitive and user friendly, with a recipe library for manage other recipes. It features a data logging asset with the ability to store up to 200 recipes and up to 2,000 data points. It is capable of simultaneously monitoring up to 20 parameters in real time. The powerful software further allows for effective model monitoring, calibration, and process control. Overall, DV-34 is a powerful, precise, and reliable etching and ashing equipment that provides a range of powerful features to help users get the most from their system. It is perfect for research labs, development labs, and high-volume productions alike.