Used SEZ / LAM RESEARCH DV-34 #9211222 for sale

SEZ / LAM RESEARCH DV-34
ID: 9211222
Single wafer etcher (4) Chambers.
SEZ PV-34 is an etcher/asher used for a variety of advanced semiconductor manufacturing applications. The equipment utilizes a combination of advanced levels of plasma etching and liquid-plasma ashing to accurately and efficiently etch/ash semiconductor materials of all types. The PV-34 offers superior etching performance, enabling very tight control of the size, shape, and passivation of the circuit decks on the substrate. The PV-34 has a unique design that permits the etching process to be adaptively adjusted in real-time, taking into account process variables such as pressure, temperature, and gas mixtures. This enables tight control of the etch shape and profile for complex shapes while providing excellent uniformity, reducing processing time and maintaining exacting surface quality and repeatability. The system fully incorporates the most advanced plasma and liquid etching technology available and includes a large range of feed-gas rates to control plasma density and uniformity. In addition, the unit is equipped with precise temperature, pressure, and power settings as well as a control suite of software to adapt the etching process to specific tasks. The PV-34 is also equipped with a range of features that assist with the operation and maintenance of the machine, such as warning and alarm messages, complete data storage, a take-up reel so that wafers can be quickly moved into and out of the tool, and a real-time logging asset. In addition, the model ensures that complete processes can be carried out in an automated manner via its intuitive user interface and flexible recipe-building tool. The tool allows recipes (from simple etching to complex patterns) to be created for repeat use, increasing efficiency. These features, combined with its capability to accurately etch and ash a wide variety of semiconductor materials, make the PV-34 a cost-effective and reliable choice for advanced semiconductor manufacturing needs.
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