Used SEZ / LAM RESEARCH DV-34 #9224050 for sale

SEZ / LAM RESEARCH DV-34
ID: 9224050
Wafer Size: 12"
Single wafer etcher, 12" (4) Chambers.
SEZ / LAM RESEARCH DV-34 is an advanced etcher and asher that is designed and manufactured by SEZ to meet the high demands of the semiconductor industry. It is an etch/ash platform that supports multiple process modules enabling users to mix and match technologies to their application needs. The process modules range from Deep Silicon Etch, Silicon Selective Etch, SiGe Selective Etch, Sputter, Diffusion, Oxide Etch, and Metal Etch. SEZ DV-34 is an intelligent tool with state of the art process control technology, including motion control, process analytic technology, and Process Automation. It incorporates universal platforms, network connectivity for diagnostics, programmable process parameter set points, customizable recipes, and temperature-controlled hardware components to ensure accurate and repeatable materials handling. LAM RESEARCH DV-34 has a dual chamber design that allows the user to configure the tool to meet their specific product fabrication needs. The indium end point sensing (IEC) technology and the advanced digital vacuum Control (DVC) allow the user the ability to precisely control parameters such as chamber pressure, temperature, and process time. The capabilities of DV-34 also include integrated wafer handling, allowing for maximum flexibility. LAM RESEARCH/LAM SEZ / LAM RESEARCH DV-34 is ideal for use in a high-throughput environment, providing faster cycle times and higher yield rates. Its wide range of process capabilities make it attractive to a wide range of users from research and development to production. SEZ DV-34 is the perfect solution for IC and MEMS manufacturers. It is a powerful etch/ash platform designed to give users maximum flexibility and process control. Its advanced features, reliable process results, and robust design provide the reliable performance necessary to deliver products with the highest yields and greatest accuracy.
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