Used SEZ / LAM RESEARCH DV-34 #9267768 for sale

SEZ / LAM RESEARCH DV-34 is a precision asher / etcher, designed to process substrates quickly and reliably using an automated two-temperature delivery equipment. This unit's comprehensive design offers standard performance for applications including but not limited to, via etch, TMR via etch, dual damascene, gate etch, hard mask etch, inter-layer dielectric removal, wafer backside etching, and isotropic etching. This unit features a dual temperature delivery system to improve processing reliability and throughput. The two temperature streams are independently programmable to achieve ideal etch or clean recipes. This is done through the use of a unique heat exchanger for both the upper and lower platen. SEZ DV-34 etcher / asher unit also includes a flood cooling machine. The cooling tool is designed to evenly cool the substrate surface at a faster rate. This allows for higher accuracy etch and clean recipes, as well as improved yields. LAM RESEARCH DV-34 is equipped with a process gas management asset. This model allows for precise regulation of process gases, such as oxygen, chlorine, and other corrosive gasses. This equipment helps simplify recipes and offers improved process purity and control. The chamber retrofit of this system is fast and easy, as the hot wall design allows for rapid retrofits without sacrificing chamber integrity. This feature of DV-34 also provides for reduced retrofit costs. The process techs in the field are also readily able to perform plasma diagnostics and process development with this chamber. Furthermore, SEZ / LAM RESEARCH DV-34 is powered by a series of integrated controllers and interfaces. This includes a full range of control options, including a user friendly graphical user interface, a recipe editor, and advanced statistical process control functions. These features contribute to improved yields and simplified processes, and are designed to improve process stability for high tool productivity. Finally, this unit enables excellent long-term process stability with a selection of process rinses and purge recipes. The purge recipes help reduce contamination and improve the efficiency of the etching process. This provides operators with the additional assurance that the etching process is working as designed. In conclusion, SEZ DV-34 is a versatile, efficient, and reliable etcher / asher machine. Its dual temperature delivery and flood cooling systems ensure uniformity and improved substrate accuracy. Moreover, its intelligent software and robust process gas management ensure excellent long-term process stability for optimal yields.