Used SEZ / LAM RESEARCH DV-34 #9351032 for sale
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SEZ / LAM RESEARCH DV-34 is an etcher, or asher, designed for the production of advanced semiconductor devices. The equipment has a powerful ion-beam deposition source and programmable positional accuracy to ensure process consistency and uniformity. It's also designed to provide exceptional throughput, high density plasma etching, and low particle generation by dynamically adjusting the process parameters. SEZ DV-34 is a fully automated system that uses DC, RF, and thermal processes to deliver fast, high-resolution etching of potentially complex patterns. It uses advanced beam-focused deposition, energetic ion-beam etching, and precise position control to achieve full-wafer uniformity. Its unique architecture features integrated controls and automation to minimize downtime while keeping up with production needs. The unit also offers a wide range of features and benefits for semiconductor device production. Its ready-to-use substrate recipes provide reliable etching results with minimal setup time. Its modular design enables flexible process development and implementation across a variety of materials. It also provides excellent uniformity and wafer registration capability. The machine is also highly efficient and cost-effective, using slightly higher fluence compared to other models. Finally, LAM RESEARCH DV-34 is designed to maximize tool availability and robustness, with proven performance, reduced downtime, and optimized productivity. It also supports a variety of safety features, including protection against arc and discharge voltages and a built-in ion shake-off function to reduce particle generation. To ensure reliable and consistent production performance, the asset also comes with fast fault detection and recovery capabilities.
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