Used SEZ / LAM RESEARCH DV-38 #9098878 for sale

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ID: 9098878
Wafer Size: 12"
Vintage: 2006
Etchers, 12" Power: 400VAC / 3P+N , 63A, 50 / 60Hz General data Equipment platform: (8) Chambers Handling: Sankyo frontside (1) Chemistry Cassette loading: Operator: Yes Overhead transport system (OHT): Yes Fab layout: Through the wall: Yes Front machine section: Front frame: (3) Load ports Front section: Robot & controller Robot end effector Main PC Front FFU Buffer station Rear section: General data for chemical blend module (CBM) Material: FM-complaint (Mat.: PVDF) Door hinges: Left Position of CCC, UPS for CCC and hand shake box: Left Position of monitor & keyboard: Left Position of the CBM Type B: Seperate CBM Type B connected to system: DV38F Rear section: ECO FFU Control cabinet Process section Left: PSL 1: Process chamber Chuck Spindle unit Dispenser motors PSL 2: Process chamber chuck Spindle unit Dispenser motors PSL 3: Process chamber chuck Spindle unit Dispenser motors PSL 4: Process chamber chuck Spindle unit Dispenser motors Gas facility box: Regulators & MFC's CDS: Pump,valves, chemistry lines General data for chemical blend module (CBM): Material: FM-complaint(Mat.: PVDF) Door hinges: Right Position of CCC, UPS for CCC and hand shake box: Right Position of monitor & keyboard: Right Position of the CBM Type B: Seperate CBM Type B connected to system: DV38F Process Section Right: PSR 1: Process chamber Chuck Spindle unit Dispenser motors PSR 2: Process chamber chuck Spindle unit Dispenser motors PSR 3: Process chamber chuck Spindle unit Dispenser motors PSR 4: Process chamber chuck Spindle unit Dispenser motors 2006-2007 vintages.
SEZ / LAM RESEARCH DV-38 is a durable and reliable etcher & asher that provides consistent high-quality processing results. The equipment is available in either single- or dual-chamber configurations, and features either an automated or manual wafer-mounting capability. The system includes a three-inch wafer chuck that is driven by a high-speed linear motor. The chuck is capable of horizontal, vertical, and bidirectional movement, and the unit provides an optimized etching/ashing profile with a wafer-to-chamber gap of 0.005" - 0.400". SEZ DV-38 incorporates a Digital Wafer Positioning Machine (DWPS) with a closed-loop servo tool for accurate wafer positioning. It has an integrated process control and monitoring asset, which includes wafer temperature measurements, chamber pressure, and recipe management. The model is equipped with optional temperature and flow controllers, allowing for precise processing conditions and tight control of process parameters. LAM RESEARCH DV-38 is designed to provide rapid and accurate processing of standard and exploratory wafers. An intuitive operator interface allows for quick setup and operation, and the equipment is designed to provide direct access to process parameters. The system is also designed to be expandable and capable of serving a variety of peripheral devices, such as resist strip and planarization systems. Optional high- and low-pressure configurations are available, allowing for overpressure of up to 10 torr for high-rate processes. DV-38 is intended for use in semiconductor wafer processing, and is capable of providing high-performance etching and ashing processes. It provides a robust platform for experimental processing and process development, and is capable of running in either batch or continuous-process modes. The unit is easy to install and maintain, and is able to provide consistent and repeatable results.
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