Used SEZ / LAM RESEARCH DV-38DS #9054505 for sale
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ID: 9054505
Wafer Size: 12"
Vintage: 2006
Wet station, 12"
Parts missing
2006 vintage.
SEZ / LAM RESEARCH DV-38DS is a dual-wave, high speed, multi-chamber etcher/asher that provides superior, cost-effective etching/ashing performance. Designated as advanced materials processing etchers/ashers, SEZ DV-38DS series is ideal for production and research/development laboratories. Utilizing both directional vertical and tangential etching/ashing waves, LAM RESEARCH DV-38DS series provides highly uniform etching/ashing operation processes in each batch. Sports cutting edge thermal management and advanced cooling techniques for the utmost in process repeatability and uniformity. DV-38DS series is available in two configurations, featuring one or two chamber systems. It allows for independent etching/ashing of parts with multiple materials in each chamber, ensuring convenient, continuous operation. The high speed operation and optimized chamber design increase process throughput and decrease cycle time. SEZ / LAM RESEARCH DV-38DS features advanced controls for precise etching/ashing of materials such as metals, oxides, and polymers. This includes the ability to control temperature, gas mix, pressure, and chamber size for maximum accuracy and repeatability. SEZ DV-38DS includes comprehensive process monitoring system to ensure consistent process results. LAM RESEARCH DV-38DS series also includes an RF source for High Density Plasma (HDP) etching/ashing processes. HDP etching/ashing allows for high quality surface finishes and high etching/ashing rates. DV-38DS series also offers the ability to mix deposition gases during the HDP process, allowing for multi-component deposits. SEZ / LAM RESEARCH DV-38DS series is designed to be user-friendly and features an Intuitive Operator Interface with graphical displays of process settings and results for easy monitoring. The series also features a wide range of diagnostic diagnostics, including process history, alarming, and etching/ashing profiles. SEZ DV-38DS Etcher/Asher series is the ultimate in advanced etching/ashing solutions. Easy to operate, LAM RESEARCH DV-38DS offers superior etching/ashing performance for production and research/development laboratories. The advanced controls and process monitoring make it perfect for users needing on-demand, repeatable accuracy and reliability.
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