Used SEZ / LAM RESEARCH DV-38F #9022266 for sale

Name: SEZ / LAM RESEARCH DV-38F
Brand: SEZ / LAM RESEARCH
SKU: 9022266
Availability: SoldOut

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Photo Used SEZ / LAM RESEARCH DV-38F For Sale

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Etchers / Ashers

Manufacturer

SEZ / LAM RESEARCH

Model

DV-38F

ID: 9022266

Vintage: 2007

System, parts machine Chemical supply module Missing parts: robot, stage, computer Type: CBM-Type B Position 1: LD, ULD Ports Robot (Transfer unit): RBT (RS-8240) Ionizer: Controller model 5024 Position 2: Buffer station Robot (Transfer unit): Dual ECO Gripper left/right Robot arm: Al anodized Ionizer: AeroBar model 5285 (e) Horiba HF monitor CM-210 Position 3, 4, 5, 6, 7, 8, 9: PMR1-PMR4, PML1-PML3 Robot (Transfer unit): Rear machine handling - (Twin ECO gripper) Chamber material: PP Chamber shape: Ring type Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chamber lower section: PP Chemical supply piping: PFA Drain piping: PVDF Chamber cleaning: DIW Ionizer: QuadBar 4630-DS ABB Protronic 500 Temp controller: in-line heater controller Position 10: PML4 Robot (Transfer unit): Rear machine handling - (Twin ECO gripper) Chamber material: PP Chamber shape: Ring type Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chamber lower section: PP Chemical supply piping: PFA Drain piping: PVDF Chamber cleaning: DIW Trebor 110R Pump Entegris 0.03um Filter Quickchange disposable filter QCDYATMTF Housing Ionizer: QuadBar 4630-DS Position 11: CHC1L Chamber material: PP Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chemical supply piping: PFA Drain piping: PVDF Siemens heater Almatec chemical drain pump Trebor 110R Pump Entegris 0.03um Filter Quickchange disposable filter QCDYATMTF Housing Levitronix BPS-3 process supply pump Position 12: CHC1L Chamber material: PP Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chemical supply piping: PFA Drain piping: PVDF Siemens heater Almatec chemical drain pump Levitronix BPS-3 process supply pump Position 13: Chamber chuck material: Chuck drive unit Al - anodized Megasonic: Honda-Ultrasonic flow meter USF100A type 230 VAC, 1 P+N, 50/60 Hz Max current: 2 A Breaking capacity: 10,000 AIC 2005 vintage.

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SEZ / LAM RESEARCH DV-38F is an advanced high-performance etcher/asher designed for the semiconductor industry. It is a fully integrated asher offering both chemical and plasma processing capabilities in the same vessel. This allows it to be operated as an etcher, an asher, or both for a wide range of applications. It is a high-end etcher/asher that has rapid cycle times with precision deposition control and uniformity of etched features. It uses ozone-based plasma and energetic ion bombardment to precisely etch target materials with extreme accuracy. It works on both complex 3D geometries and very thin films. The unique design of SEZ DV-38F features a modular, multi-role concept allowing each module to be used either alone as a stand-alone unit or to be connected to other modules in complex configurations for more specialized applications. With its powerful and versatile features, it is capable of processing a wide variety of materials, including metal oxides, silicon, compound nitrides, and polysilicon. The etcher/asher is compatible with a wide range of materials and chemicals, making it an ideal tool for processing metal oxides, compound nitrides, tungsten, and polysilicon for large-scale device manufacture. The onboard delivery system allows these materials to be further processed in the same process cycle in one single step, providing greater production throughput. The etcher/asher has up to four antechamber doors that can be opened or closed to prevent contamination during processing. Additionally, it has an extensive range of safety features to ensure that no harm is caused to personnel or to the device being processed. LAM RESEARCH DV-38F is a top-end etcher/asher that is capable of producing excellent results while maintaining a large production throughput. With its advanced precision control and efficient process cycles, it is an ideal tool for those looking for an advanced etcher/asher.