Used SEZ / LAM RESEARCH DV PRIME #293754190 for sale

SEZ / LAM RESEARCH DV PRIME is an etcher / asher specifically designed for semiconductor device fabrication. It is a batch process equipment that provides users with reliable, repeatable, and accurate etching or ashing of substrates with very high throughput. The system is equipped with a new powerful and intuitive Windows operating unit, allowing users to easily and efficiently program batch process parameters. The machine can handle any number of substrates in the substrate holder, allowing users to program their own desired batch size within the tool. It also features an automated lift for loading and unloading substrates as well as an internal vacuum chuck for higher throughput down to 0.2 micron linewidth. It is also furnished with an embedded programmable logic controller (PLC), allowing users to program and data log individual etch/ash processes. SEZ DV PRIME features high-performance etching capabilities thanks to its proprietary drip-on-demand and pulse-fire laser discharge sources. The discharge is housed in a custom-built chamber providing users with a contaminate-free, high-precision etch/ash process. The chamber is also equipped with an advanced exhaust asset allowing for fast uniform gas flow throughout the chamber, providing consistent and reliable etching or ashing results. In terms of safety, the etcher / asher is equipped with multiple safety systems including a lid interlock model for occupant protection, pressure leak sensors, gas safety shut-off controls, and a temperature alarm equipment. This ensures the system is compliant with the latest safety regulations and standards, making it a safe and secure etching and ashing unit for users. Overall, LAM RESEARCH DV PRIME is an advanced etcher / asher specifically designed for semiconductor device fabrication. The machine is designed for accurate, reliable, and repeatable etching/ashing of substrates with very high throughput. It is equipped with a new Windows operating tool and has multiple safety systems to ensure safe and compliant operations.