Used SEZ / LAM RESEARCH DV PRIME #9211223 for sale

SEZ / LAM RESEARCH DV PRIME is an advanced, highly reliable and cost-effective etcher/asher designed for high throughput processing of various materials. It provides an integrated solution for a variety of deposition, etch and ashing process steps. The etcher/asher is equipped with a powerful, mid-frequency, pulsed, multi-frequency RF power source, a long lifetime chamber, and automated process control and monitoring. SEZ DV PRIME can etch and asher a range of wafer sizes, from 200mm to 450mm. It also has a multi-use chamber the enables multi-level processing. The chamber can be equipped with multiple etching chemistries, such as oxygen, chlorine, fluorine, SF6 and NF3, and a wide range of substrate materials, such as silicon, silicon oxide, nitride, poly-silicon, gallium arsenide, germanium, and copper, among others. The automated process control and monitoring features reduce etching times and allow for repeatable process results. The chamber is fan-cooled and equipped with a wide variety of upper and lower electrode configurations, providing design flexibility for unique process needs. The chamber also has a low-load temperature monitor, a pressure monitoring equipment, and a bubbler system for the delivery of optional gases. An inert gas can be used for safety. The chamber also has a programmable flow gas control unit and a 4-channel temperature controller with a minimum achievable temperature of -20°C. The machine is designed to comply with applicable safety standards, including CE certification and ANSI certification. LAM RESEARCH DV PRIME etcher/asher is a reliable and versatile etching and ashing solution for a variety of high-volume processing needs. Its flexible, automated process control and monitoring features can reduce etching times and deliver repeatable process results. Its fan-cooled chamber and customizable upper and lower electrode configurations provide high-precision etching and ashing capabilities, making it suitable for a variety of substrates. Its inert gas safety tool enhances its reliability and safety for operation. The asset is designed to comply with applicable safety standards.