Used SEZ / LAM RESEARCH DV PRIME #9239260 for sale

SEZ / LAM RESEARCH DV PRIME is a compact, versatile semi-automatic batch etch/ash processing equipment used for etching and ash coating of a wide variety of substrates. This system is ideal for etch/ash applications in many applications, including through-hole, backdrill etch, lead alteration, and surface mount solder bumps. The unit provides reliable, repeatable, and consistent processing results, allowing high-yield wafer production. SEZ DV PRIME has a 4-axis robot arm with precision tooling designed for precision and repeatable process control. The robot automation includes an integrated gas and liquid delivery machine, which provides for accurate and precise delivery of gasses, liquids, and spray materials. The gas and liquid delivery tool is further complimented by a dedicated vacuum subsystem, allowing for precision vacuum control during process. LAM RESEARCH DV PRIME have an Etch/Ash Chamber, designed to offer a shielded environment to maximize process uniformity, for both gaseous and liquid etch/ash processes. The Etch/Ash Chamber has been designed to minimize particle and outgassing components and to provide process versatility. The asset controlled by an industrial strength computer, running proprietary software. The computer is managed by a 19" full industrial touch panel, which provides an easy to use graphical user interface for ease of use and repeatable process results. The processing recipes are modular, allowing for process parameter optimization for a wide array of substrates and materials. The model supports both batch or continual processing and is upgradeable with software options to increase shelf-life, throughput, and overall process performance. The data management equipment allows for quality assurance data monitoring and data collection. DV PRIME is an ideal system for semiconductor cleanroom environments. Its small footprint and low power consumption make it suitable for use in semi-autonomous laboratory environments. The unit is made to meet various safety and environmental standards (such as ISO, SEMI, and OSHA) to ensure the health and safety of personnel and the environment.