Used SEZ / LAM RESEARCH FM 202 #9226924 for sale

SEZ / LAM RESEARCH FM 202 etcher / asher is an advanced, high-precision processing space equipped with a state-of-the-art design. This single-wafer processing tool has a small footprint and is ideal for a wide range of production and research applications. SEZ FM 202 etcher / asher has a compact design that is equipped with a 9-inch, 300 mm, or 400 mm wafer carrier, an integrated scrubber, and a full-featured control equipment. It has a full perimeter shield to minimize solvation and particle contaminants. It also features automatic fill and drain from a single inlet operator interface and enables closed loop processing with a full diagnostics suite. LAM RESEARCH FM 202 etcher / asher provides accurate, automated, and repeatable processes for a wide range of etching and ashing applications. It is also capable of performing high-value processes in process-critical applications such as high aspect ratio etching. Through its advanced technologies, FM 202 ensures superior etch uniformity and feature control. SEZ / LAM RESEARCH FM 202 has one of the industry's most advanced process control systems. It provides a sophisticated real-time monitoring system to ensure optimal processing for any application, with intuitive on-point information to speed up and streamline production. The unit is easily adaptable to customers' specific needs and can be customized to integrate the user's process preferences. SEZ FM 202 etcher / asher also has excellent safety features. It is designed to tackle a variety of most challenging environments and is compliant with safety regulations. It is UL 1604 certified, CSA listed, and CE approved. With its special fire control machine, high lift security gate, and oversized chamber, LAM RESEARCH FM 202 provides a safe and secure etching experience. FM 202 etcher / asher is the perfect choice for a variety of etching and ashing applications. It provides superior performance, ensures accurate process control, and features advanced safety features for safe, efficient operation.