Used SEZ / LAM RESEARCH MCM 203 #9387804 for sale

SEZ / LAM RESEARCH MCM 203 is an advanced etching/ashing equipment capable of producing simultaneous high accuracy, precise, and repeatable results. The system is designed to meet the needs of integrated circuit (IC) manufacturers by providing a cost-effective solution for etching/ashing processes. The unit is available in a small footprint of 1630 x 580mm and features a standard, maximum plate size of 425 x 425mm. SEZ MCM 203 utilizes a special multi-chemical-mechanical abrasive machine to etch and pattern integrated circuits, with a three-stage process using an abrasive action and mechanical scrubbing to shape the material layer. The tool's uniformity across the entire plate surface is ensured through the precise contact control, low power settings, and controlled acceleration resulting in higher throughputs and yields. The asset is equipped with a corrosion-resistant ALD/CVD plasma pulsed model for thin-film etching and ashing of photoresists, while LAM RESEARCH MCM 203 also offers the option of wafer cleaning. The equipment functions within a vacuum as low as 6 mbar, accelerating up to 500 m/s with a contamination-controllable bake temperature. MCM 203 is designed with a 9KW air-cooled RF generator system that allows for rapid and repeatable wafer imaging across a variety of substrates. SEZ / LAM RESEARCH MCM 203 is a top-of-the-line etcher/asher designed to meet high-volume production demands. The unit includes robust safety features such as automated fire extinguishers, an alarm machine, and interlocks. It is further constructed with top-quality materials, including stainless steel, silver-plated copper, and phenolic epoxy boards. The tool is fully supported by knowledgeable technicians who can provide operating tips and troubleshooting in the event of a failure.