Used SEZ / LAM RESEARCH RST 100-6 #293747989 for sale

SEZ / LAM RESEARCH RST 100-6 is a fully enclosed, automated, high-capacity batch etcher/asher equipment. It is designed to etch and asher up to twelve 8-inch quartz holders in a single batch. It features an insulated vessel design, with a capacity of up to 30 liters, and a patented wafer loading system for fast, repeatable loading of wafers. The unit also features a high-flow, sub-micron etching process, which provides for both high uniformity and high etch rate. The etching process is capable of achieving etch depths of up to 5 microns in a single batch. Additionally, the machine features an ionized cleaning process option, which enables increased cleaning of the etched or ashed wafers, and ensures removal of any residues left during etching. SEZ RST 100-6 also features a set of automated safety features, including an internal pressure seal, an internal heater, an external temperature sensor, and a power shutoff tool. Overall, the unit is designed for use in semiconductor processing, for etching and cleaning large areas of electrical substrates.