Used SEZ / LAM RESEARCH RST 100-6 #293830231 for sale

SEZ / LAM RESEARCH RST 100-6 is an advanced etcher/asher equipment that is applicable as a metallization process for semiconductor device fabrication. The system is ideally suited for high-volume production applications as well as those requiring fine, detailed line work and pattern definition. SEZ RST 100-6 is designed for the processing of substrates up to 200 mm x 200 mm, with a default feature size of 0.35 um, adjustable down to 0.20 um. The high-resolution resistive levels provided allow for the etching of fine lines on Si, SiO2, polysilicon, aluminum, and aluminum oxide. The unit includes a quartz or ceramic susceptor chamber, with a quartz or ceramic Cl2/O2 source which is used to etch photosensitive resists and other materials. LAM RESEARCH RST 100-6 utilizes a low-pressure, low-temperature process which produces clean, high-resolution lines, without the attachment of material to the sidewalls. The machine offers precise temperature and ozone control, as well as gamma exposure of the plate for increased throughput. The tool also includes a low- and low-pressure process, which can reduce total processes by up to 10%. The asset offers high process consistency and can be used for applications requiring minimal scumming. In addition, the model offers integrated vision technology, allowing for real-time monitor and in-line wafer selection of optimal wafers, with increased levels of accuracy and reduced waste. RST 100-6 is controlled using Integrated Computer-Aided Manufacturing (ICAM) equipment software, allowing for networked control of the system from any workstation. Overall, SEZ / LAM RESEARCH RST 100-6 etcher/asher is a high-precision, automated unit designed for high-volume and long-term production needs, and which reduces costs associated with metallization process, making it ideal for many semiconductor device fabrication applications.