Used SEZ / LAM RESEARCH RST 100 #9161499 for sale
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SEZ / LAM RESEARCH RST 100 Etcher/Asher is a semi automated asher/etcher equipment used for the etching and ashing of material in a production run. It is designed with a 4 inch by 8 inch chamber and can process a variety of materials including chips, glass, copper, and PCB boards. SEZ RST 100 is capable of processing up to 50 wafers per run with a throughput time of less than 5 minutes per wafer. LAM RESEARCH RST 100 is designed with a high speed, low-pressure, oil-free and non-contaminating etching system. This unit features a personal computer (PC) with an LCD display to control etching and ashing time, temperature and chamber pressure. The machine also features an automated lift to transfer wafers from the etcher / asher to the next process allow for rapid wafer processing. RST 100 has a superior process recipe control and verification feature for improved process monitoring and control. This tool has an advanced thermal profile control, allowing for uniform temperatures distribution throughout the chamber and uniform etching and ashing results. The process temperature range is from 25°C to 525°C, and pressures of up to 25 Torr. SEZ / LAM RESEARCH RST 100 is also designed with a reliable and easy to use user interface to easily program wafers separately in batches and with a password protection asset for security features. Other features include a multi-level vacuum control, a programmable end-of-run notification, and a recoverable shut down model; allowing to start the process again with newly configured parameters. In addition, SEZ RST 100 has an excellent safety equipment, including a built-in power failure protection, an over-pressure protection system, a chemical containment unit with over-pressure and over-vacuum sensors, and an ammonia detection machine. LAM RESEARCH RST 100 is an excellent choice for etching and ashing processes, offering an easy to use PC-based tool with precise temperature and pressure control, reliable and secure password protection, excellent safety features, and automated wafer transfer functionality. With its advanced process control and verification features, RST 100 is an effective and reliable solution for efficiently etching and ashing materials.
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