Used SEZ / LAM RESEARCH RST 201 #293595864 for sale
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SEZ / LAM RESEARCH RST 201 is an automated, high-precision etch/asher equipment designed for use in research and production applications. The unit uses advanced etching and processing technologies to enable controlled substrate removal, resulting in high-quality deposition of conductive or semiconductor materials on a variety of wafer types. The two-step process begins with an oxygen plasma etching system that utilizes two independent electromagnetically pivoted 3-inch etching nozzles and a laser-guided plasma beam. This step etches unwanted material from the substrate surface, preparing it for deposition. The unique, industry-leading feature of SEZ RST 201 is its dual-beam configuration, which enables both isotropic (equal to all angles) etching, as well as directional etching, depending on the end application. Next, LAM RESEARCH RST 201 features SEZ 800 Asher, which deposits conductive or semiconductor material onto the substrate surface. The unit features a sophisticated onboard software unit for controlling the deposition parameters, as well as three independent laser-guided vacuum nozzles that enable precision deposition. Finally, RST 201 also includes a machine for handling and process-monitoring. The integrated workstation is equipped with full safety interlocks, electronic monitoring systems, and Online De-Consolidation and Diagnostic Modules (ODDs) that enable automated maintenance and troubleshooting. Overall, SEZ / LAM RESEARCH RST 201 is a powerful, high-precision etch/asher tool designed to provide reliable, reproducible results over a variety of materials and substrates. With its dual-beam configuration and variable processing control, it is a reliable choice for users looking for a high-end etching and generation asset.
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